Tender Summary

904 - Compound Semiconductor Plasma Processing Equipment

Buying Organisation

Aston University

Contract Value

£1,200,000

Tender Description

The College of Engineering and Physical Sciences (EPS) at Aston university is creating a III-V semiconductor fabrication facility. As a consequence, we are seeking a single supplier to provide a suite of plasma processing tools for:
ICP Etch of semiconductor materials (e.g. GaAs, GaN, InP, GaSb)
RIE Etch of dielectric materials (e.g. SiO2, SiNx) and metals (e.g. Au, Ge, Cr, Ti, Pt, Pd)
Deposition of dielectric layers (e.g. SiO2, SiNx)
The full project specific requirements and equipment specification can be found within the project question set on Aston Universitys e-tendering portal ProContract under Section 11 Project Specific Requirements.

Tender categories (products & services required)

Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000)

Region

West Midlands (UKG)

Buyer Information

Aston University

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